MEMS Heating + Biasing

High Temperature, 9-Contact Biasing, Most Accurate Double Tilt, High T EDS

Technical Specs

	Single-Tilt	Double-Tilt
Tilt Range	Up to ± 45° depending on objective pole	Up to ± 20° (alpha and beta) depending on objective pole
Beta-tilt accuracy	NA	<0.01 degree
Electrical Contacts	9*	9*
Contact Type	Direct Chip Contact	Direct Chip Contact
Max Operating Temperature	> 1000°C	> 1000°C
Settled Resolution at 1000°C	Up to TEM resolution	Up to TEM resolution
Temperature Stability	+ 100 hours	+ 100 hours
Temperature Measurement	4-point resistance sensing	4-point resistance sensing
EELS / EDS Compatible	Yes (full temp range)	Yes (full temp range)
TEM Compatibility	TFS/FEI, JEOL, Hitachi	TFS/FEI, JEOL, Hitachi

* Contact us for Custom Configurations

Features

Overview

Hummingbird Scientific’s in-situ TEM MEMS Biasing/Heating Sample Holder allows users to heat and/or electrically bias their sample inside the TEM. Heating can be performed to > 1000°C in closed loop control with an on-chip sensor.

The system features:

Direct chip contact insertion mechanism—no fragile probes that make inconsistent contact involved, so easy to use.
Standard MEMS chip biasing/heating with 9 contacts
Single and double tilt configurations
4-point temperature sensing method
Shielded electrical cables for low current measurements
Integrated heating and voltage source meter controller
Intuitive graphical user interface for system control
EDS compatible over the full temperature range

The system is available as a single-tilt and double-tilt version. The double-tilt holder features a high-accuracy (<0.01 degree) beta-tilt mechanism and no tilt-backlash when changing tilt direction, making it the most stable and usable double-tilt holder available.

For more details: heating-biasing

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