Micro-X-ray Fluorescence (micro- XRF) spectroscopy is a non-destructive analytical technique that can be used alongside conventional Energy Dispersive Spectroscopy (EDS) on a Scanning Electron Microscope (SEM). 

Micro-XRF on SEM, also known as SEM XRF, delivers the SEM with a range of new capabilities such as the ability to measure and map trace elements, the analysis of layered samples, and more.

Trace Element Detection

X-ray analysis is more sensitive towards trace elements, allowing their detection at concentrations down to as low as 10 ppm for certain elements, an extended X-ray spectral range (up to 40 keV), as well as information from a greater depth within the sample. 

Elemental Mapping with Small Spot Sizes

QUANTAX micro-XRF is equipped with XTrace 2, our latest X-ray source, including a micro-focusing X-ray optic that yields small spot sizes of down to 10 µm at a high-intensity throughput. 

Multilayer Sample Analysis

The larger depth of X-ray excitation allows for the characterization of multilayer samples from 1 nm up to 40 µm, which is not possible via electron beam excitation.